Mass flow controllers are a crucial component in industrial, high technology and harsh environment applications where accurate flow rates and precise process control are critical. There are several different ways to measure mass flow rates based on different physical principles.
In this technical note, we explore:
- Basic and working principles of mass flow and mass flow measurement technology.
- Product characteristics of various types of Mass Flow Meters (MFMs) and Controllers (MFCs) based on different measurement principles.
- Use of MFCs in key industrial applications such as Vacuum/Pressure Control, Physical Vapor Deposition, and Chemical Vapor Deposition for accurate and stable flow measurement and control.
